Many objective optimization of a magnetic Micro–Electro–Mechanical (MEMS) micromirror with bounded MP-NSGA algorithm

The paper proposes the automated optimal design of a class of micro–electro–mechanical(MEMS) devices, based on a procedure of finite element analysis coupled to evolutionary optimizationalgorithms. A magnetic MEMS, used as an optical switch, is considered as the case study. In particular,the geometry of the device is optimized in order to maximize the actuation torque and minimize thepower losses and the device volume. The optimization algorithms belong to the genetic class and,in particular, Migrated Parents - Non-Dominated Sorting Genetic Algorithm MP-NSGA, with threeobjective functions, is compared to NSGA-III.